| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum pump stage having compression and evacuation speed not only within a viscous flow but also within a molecular flow. <P>SOLUTION: In order to provide the vacuum pump stage having the compression and evacuation speed not only within the viscous flow but also within the molecular flow, the vacuum pump stage is characterized in that a rotor has structural elements (114, 116), a pumping action is generated based on Gaede within the viscous flow, and the pumping action is generated based on a side-channel principle within the higher pressure by these component elements. <P>COPYRIGHT: (C)2012,JPO&INPIT |
