| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum pump device that prevents cooling water from getting cloudy. <P>SOLUTION: A steam supply pipe 3 is connected to a jacket 2 through a control valve 7. The vacuum pump device 6 is connected to the lower end of the jacket 2 through a steam trap 4 and an opening and closing valve 9. The vacuum pump device 6 is constituted of a liquid ejector 13, a cooling water tank 14, and a circulation pump 15. A strainer member 18 is attached to the inlet side of the circulation pump 15, and a flowmeter 22 is attached to the outlet side, respectively. A temperature sensor 20 is attached to the cooling water tank 14. On the basis of a detected flow rate value of the flowmeter 22, the vacuum pump device detects a clogged state of the strainer member 18, indirectly detects a degree of turbidity of cooling water in the cooling water tank 14, and prevents the cooling water from getting cloudy by blowing the strainer member 18. <P>COPYRIGHT: (C)2012,JPO&INPIT |
