发明名称 PREPARATION OF GRAPHENE THIN FILM TRANSISTOR USING THE EDGE-FUNCTIONALIZED TWO-DIMENSIONAL GRAPHENE NANORIBBONS
摘要 <p>PURPOSE: A method for manufacturing a thin film transistor using a two-dimensional graphene nano ribbon is provided to control the length of a graphene nano ribbon by using a Pd catalyst. CONSTITUTION: A source electrode and a drain electrode are connected to both sides of a channel layer. A gate electrode corresponds to the channel layer. A gate insulation layer is formed between the channel layer and the gate electrode. After the gate insulation layer is deposited on the gate electrode, the source electrode and the drain electrode are formed by a lithograph process. A hydrophobic organic layer is laminated after the gate insulation layer, the source electrode, and the drain electrode are surface-processed.</p>
申请公布号 KR101082335(B1) 申请公布日期 2011.11.10
申请号 KR20100046874 申请日期 2010.05.19
申请人 KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY 发明人 LEE, SUN SOOK;LEE, KEE IN;LIM, JONG SUN;LEE, YOUNG KUK;JEONG, SEOG JONG;CHUNG, TAEK MO;KIM, CHANG GYOUN;AN, KI SEOK
分类号 H01L29/786 主分类号 H01L29/786
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