CHARGED PARTICLE BEAM DEVICE, CHIP REGENERATION METHOD, AND SAMPLE OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To aim at regeneration of a pyramid structure of a tip of a chip without taking it out from a charged particle beam device.SOLUTION: The charged particle beam device is provided with: a needle-like chip 1; a gas supply unit supplying gas to the chip 1; an extraction electrode 4 for extracting an ion beam by ionizing a gas adsorbed on a chip surface; a voltage supply unit 27 impressing voltage between the chip 1 and the extraction electrode 4; and a chip regeneration electrode equipped with the same metal as that of the chip surface, on a surface where the ion beam is irradiated.