摘要 |
PROBLEM TO BE SOLVED: To reduce the size of a variable capacitive element using a ferroelectric substance that can attain expansion of a variable region of electrostatic capacity, while at the same time, maintaining a high Q-value.SOLUTION: The variable capacitive element using a ferroelectric substance is provided with a ferroelectric layer 21, connected between first and second electrodes 22, 24; the ferroelectric layer 21 has a Perovskite structure that is phase-transformed from cubic crystal to tetragonal phase by compression stress Y that the ferroelectric layer has inside; and by using the ferroelectric layer, the variable capacitive element can be reduced in size. |