Vertical junction field effect transistors, and methods of producing the same

摘要

A vertical junction field effect transistor comprising: a drain semiconductor portion; a drift semiconductor portion placed on the drain semiconductor portion and having first, second, and third regions; a buried semiconductor portion placed on the first, second, and third regions of the drift semiconductor portion; a channel semiconductor portion placed along the buried semiconductor portion on the first and second regions, and electrically connected to the third region of the drift semiconductor portion; a source semiconductor portion placed on the channel semiconductor portion and the first region of the drift semiconductor portion; a second gate semiconductor portion placed above the second region or above the second and third regions of the drift semiconductor portion; a second gate electrode placed above the second region or above the second and third regions of the drift semiconductor portion, electrically connected to the second gate semiconductor portion, and electrically isolated under the source electrode; a source electrode electrically connected to the source semiconductor portion above the first region of the drift semiconductor portion, electrically isolated from the second gate electrode above the second gate electrode, and placed above the first, second, and third regions of the drift semiconductor portion; and connection semiconductor portions, penetrating the channel semiconductor portion so as to electrically connect the second gate semiconductor portion and the buried semiconductor portion, and scattered above the second region of the drift semiconductor portion.