ABRASIVE-FREE POLISHING SYSTEM,申请号EP20060813337-传众专利搜索

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发明名称	ABRASIVE-FREE POLISHING SYSTEM
摘要
申请公布号	EP1924666(B1)	申请公布日期	2011.10.12
申请号	EP20060813337	申请日期	2006.08.09
申请人	CABOT MICROELECTRONICS CORPORATION	发明人	CHERIAN, ISAAC;MOEGGENBORG, KEVIN
分类号	C09G1/04;H01L21/321	主分类号	C09G1/04
代理机构		代理人
主权项
地址

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