EXTREME ULTRAVIOLET LIGHT GENERATOR

摘要

Disclosed is a chamber apparatus which can be used along with at least one laser beam generator. The chamber apparatus may comprise: a chamber which serves the purpose of introducing at least one laser beam emitted from the at least one laser beam generator into the inside of the chamber and which has at least one entrance; a target supply unit which is arranged in the chamber and can supply a target substance to a predetermined zone in the chamber; a laser-focusing optical system which can focus the at least one laser beam in the predetermined zone; and an optical element which can correct the light intensity distribution in a beam cross-section of the at least one laser beam in the predetermined zone.