ULTRAVIOLET IRRADIATION DEVICE

摘要

The disclosed ultraviolet irradiation device is provided with: a plurality of processing chambers (20) that are vertically disposed in a manner so as to face each other, and that each have, on the inside, both a panel-holding section for holding a panel (P) to be processed, and a plurality of linear light sources disposed parallel to one another for radiating ultraviolet rays to the panel (P) to be processed that is held at the panel-holding section; and an interior circulating system (26) for circulating air in each processing chamber (20) from the outside of each processing chamber (20).