| 摘要 |
According to one embodiment, a semiconductor device includes: columnar gate electrodes that are separated from one another in a row on a semiconductor substrate; a gate insulating film that covers side faces of the columnar gate electrodes; a first semiconductor layer of a first conductivity type that is formed on the semiconductor substrate between the adjacent columnar gate electrodes; a insulating layer that is formed on the first semiconductor layer between the adjacent columnar gate electrodes; and a second semiconductor layer of a second conductivity type, which is different from the first conductivity type, that is formed on the insulating layer between the adjacent columnar gate electrodes. In the semiconductor device, a first MOSFET of the first conductivity type that uses the first semiconductor layer as a channel is formed, and a second MOSFET of the second conductivity type that uses the second semiconductor layer as a channel is formed.
|
