| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for testing semiconductor devices and capable of reliably reducing overcurrent of when an element to be measure made of a semiconductor device is broken when short-circuit destruction withstanding capability test is performed on the element to be measured. SOLUTION: A test apparatus comprises a DC power source 1 for applying a DC voltage to the element to be measured 3, a semiconductor device to be tested; a power switch 2 serially connected to the element to be measured 3 and having a maximum output current value greater than a maximum output current value of the element to be measured 3; and control circuits 9 and 10 for controlling the power switch 2 as to pass a current of its maximum output current value when the element to be measured 3 is tested. COPYRIGHT: (C)2011,JPO&INPIT
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