| 摘要 |
PROBLEM TO BE SOLVED: To attain a high throughput of a substrate conveying apparatus, and to reduce the weight of a substrate-holding mechanism. SOLUTION: The substrate-holding mechanism includes a slide arm 2 having a plurality of pads 8, 9, 10, and 11 on which a substrate 1 can be placed; a fixing arm 3 which supports the slide arm 2 so that it is slidable between an extended position and a contracted position; and a pusher 12, fixed to the fixing arm 3 which does not come into contact with the substrate 1, when the slide arm 2 is in the extended position, and is brought into contact with the circumference edge of the substrate 1, when the slide arm 2 is in the contracted position. When the slide arm is in the contracted position, the substrate 1 is held by the plurality of pad 10 and 11 and the pusher 12. COPYRIGHT: (C)2011,JPO&INPIT
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