| 摘要 |
PROBLEM TO BE SOLVED: To abrade a minute protrusion on a substrate up to a required height, even when an abrasive head can not be installed and adjusted accurately, and to prevent damage to an abrasive tape. SOLUTION: The abrasive head 521b is oscillatably mounted in a lower part of a base member 521a by making a direction orthogonal to a width direction of the abrasive tape 510 as a shaft 521c. The abrasive tape 510 including smooth surfaces 510e, 510e functioning as stoppers in abrading operations at both ends of the width direction across an abrasive surface 510d is pressed against the minute protrusionαby the abrasive head 521b, and the minute protrusionαis abraded by transferring the abrasive tape 510. Here, abrasion progresses, and as the height of the minute protrusionαbecomes lower, the inclination of the abrasive head 521 with respect to the substrate BS becomes is reduced, and eventually, both smooth surfaces 510e, 510e abut on the substrate BS, thereby enabling prevention of one-sided contact of the abrasive tape 510. COPYRIGHT: (C)2011,JPO&INPIT |
