| 摘要 |
PURPOSE: A method for detecting a laser processing area is provided to accurately detect a laser processing area using a gray scale standard deviation value. CONSTITUTION: A surface of a substrate including a laser processing area is photographed using a CCD(Charge Coupled Device) camera. A gray scale map of the surface is made using a CPU. A standard scale standard deviation value is calculated about whole pixels of the gray scale map. The laser processing area is determined using the first gray scale standard deviation value. |
