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发明名称
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED DATA PROCESSING APPARATUS AND COMPUTER PROGRAM PRODUCT.
摘要
申请公布号
NL2005989(A)
申请公布日期
2011.08.23
申请号
NL20112005989
申请日期
2011.01.12
申请人
ASML NETHERLANDS B.V.
发明人
MENCHTCHIKOV, BORIS;PADIY, ALEXANDRE VIKTOROVYCH
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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