| 摘要 |
PROBLEM TO BE SOLVED: To provide a teacher data superior in the repeatability and the objectivity, and alleviate a load of an operator for creating the teacher data, concerning a method for creating the teacher data for automatically classifying defects in a substrate, a defect classification method using it, and an apparatus. SOLUTION: In the method, the operator teaches only a teacher image as a typical example of at least one category in a plurality of classification categories among collected defect image data (step S202). A host computer calculates the feature quantity of each defect image (step S203), and each defect image is tentatively classified in response to a Euclidean distance between the teacher image in a feature quantity space (step S204). The tentatively-classified defect image is reclassified by using an ensemble classifier (step S205-S209) to keep on setting the classification sequentially. COPYRIGHT: (C)2011,JPO&INPIT |
