| 摘要 |
<p>An angular velocity sensor comprises, on the X-axis, the Y-axis, and the Z-axis which intersect one another at right angles: a support body; a holding section joined to the support body; first to fourth weights; first to fourth arms; drive units for driving the first to fourth arms; monitor units for detecting the displacement of the first to fourth arms; and detection units for detecting the displacement of the first to fourth arms. The detection units are provided so as to be symmetrical relative to an axis parallel to the X-axis and to be symmetrical relative to an axis parallel to the Y-axis. The angular velocity sensor can cancel an unnecessary signal caused by disturbances, such as acceleration and an impact, and can highly accurately detect angular velocity.</p> |
