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发明名称
ION IMPLANTATION BEAM ANGLE CALIBRATION
摘要
申请公布号
EP1955357(B1)
申请公布日期
2011.07.06
申请号
EP20060838009
申请日期
2006.11.17
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
RATHMELL, ROBERT;KAMENISTA, DENNIS
分类号
H01J37/304;H01J37/317
主分类号
H01J37/304
代理机构
代理人
主权项
地址
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