TEMPERATURE CONTROLLED UNIT OF CHUCK IN PROBER FOR WAFER TEST

摘要

PURPOSE: A chuck temperature control device of a prober for inspecting a wafer is provided to improve inspection efficiency by simultaneously inspecting a semiconductor wafer at a low temperature and a high temperature. CONSTITUTION: A wafer is mounted on a chuck plate(42). A heat transfer plate(45) transmits heat from a thermoelectric semiconductor to the chuck plate. A temperature control plate(48) uses the thermoelectric semiconductor for heating and cooling the wafer and the chuck plate. A heat exchange plate is installed on the lower side of the thermoelectric semiconductor and absorbs the heating and cooling from the thermoelectric semiconductor.