| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope with which a quantitative element image with high S/N and an electron beam energy loss spectrum with high energy accuracy and high energy resolution can be measured. SOLUTION: While irradiating electron beams on the same irradiation position of a test piece for a prescribed time, the test piece is scanned and a Z contrast image is observed and a characteristic X-ray spectrum and an electron beam energy loss spectrum are measured. In this case, the characteristic X-ray spectrum is corrected of a dead time by excessive X-rays, and the electron beam energy loss spectrum makes energy correction based on a zero-loss peak to carry out the measurement. Thereby, a quantitative element image with high S/N by the characteristic X-rays and an element image with high S/N by the electron beam energy loss spectrum, and a high energy resolution spectrum can be measured. COPYRIGHT: (C)2011,JPO&INPIT |
