| 摘要 |
PURPOSE: An excimer lamp is provided to stabilize the illumination of the lamp by adequately setting the discharging gap of a light emitting tube and the molarity of fluorine filled in the light emitting tube. CONSTITUTION: The light emitting tube(2) of an excimer lamp(1) is composed of transmissive ceramic sapphire in a straight pipe shape. Both end parts of the light emitting tube is opened. Caps(21, 22) based on sealing metal are welded on both end parts of the light emitting tube. A gas tube(23) including nickel is installed at one cap of the light emitting tube. The inside of the light emitting tube is decompressed through the gas tube, rear gas and fluorine are filled in the light emitting tube.
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