| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint system and imprint method that can improve transferability. SOLUTION: The imprint system includes a formation unit which forms a layer to be transferred on a surface of a base, an imprint unit which transfers a pattern to the layer to be transferred, a first gas supply unit which supplies a first gas lower in solubility in the layer to be transferred than air to the formation unit, a second gas supply unit which supplies a second gas higher in solubility in the layer to be transferred than air to the formation unit, and a control unit which controls the supply of the first gas and the supply of the second gas. COPYRIGHT: (C)2011,JPO&INPIT |
