THREE-STAGE FORMATION OF THIN-FILMS FOR PHOTOVOLTAIC DEVICES
摘要
A method for producing a film of compound semiconductor includes providing a substrate and a compound bulk material having a first chemical composition that includes at least one first chemical element and a second chemical element. A film is deposited on the substrate using the compound bulk material as a single source of material. The deposited film has a composition substantially the same as the first chemical composition. A residual chemical reaction is induced in the deposited film using a source containing the second chemical element to thereby increase the content of the second chemical element in the deposited film so that the deposited film has a second chemical composition. The film may be employed in a photovoltaic device.
申请公布号
WO2011050015(A2)
申请公布日期
2011.04.28
申请号
WO2010US53293
申请日期
2010.10.20
申请人
SUNLIGHT PHOTONICS INC.;FROLOV, SERGEY;BRUCE, ALLAN, JAMES;CYRUS, MICHAEL