| 摘要 |
<p>PROBLEM TO BE SOLVED: To repair a blank defect hard to repair in a defect repairing device using an ion beam. SOLUTION: In the defect repairing device using an ion beam, a blank defect hard to repair is observed with AFM(atomic force microscope) or the like. The probe 1 of a probe microscope made of a carbon nanotube is put directly above the defect 2 to be repaired and pulse voltage is applied to the probe to form a carbon-containing film 4 directly below the probe. In consideration of the consumption of the carbon nanotube as a material, a plurality of carbon nanotube probes are prepared and used under changeover. In the case of a relatively large defect, pulse voltage applied to one- or two-dimensionally arranged carbon nanotube probes is selectively subjected to ON-OFF control in accordance with the shape of the defect to enhance throughput.</p> |
