| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a desired image with a high degree of precision on an exposure surface of a substrate having a poor surface flatness, without using an autofocusing function. <P>SOLUTION: The substrate 1 is supported on a substrate support member 2. A rigid light transmissive member 4 is disposed between a projection optical system 3 and the substrate 1. The light transmissive member 4 has a plane 4a that faces an exposure surface 1a of the substrate 1. The plane 4a is positioned so as to be identical to an image forming plane of the projection optical system 3. A driving mechanism 5 is provided for moving the substrate support member 2 so that the exposure surface 1a is moved close to or away from the plane 4a of the light transmissive member 4. <P>COPYRIGHT: (C)2011,JPO&INPIT |
