发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FORMING USING THE SAME
摘要 PURPOSE: A semiconductor device and a method for forming using the same are provided to prevent leakage current from a transistor by easily forming an element isolation film in a semiconductor IC to accurately define an active region. CONSTITUTION: In a semiconductor device and a method for forming using the same, an epitaxial growth layer(110) and an insulating layer(108) are formed on a semiconductor substrate(100). The lower region of the insulating layer has thickness of 1500Å to 2000Å. The upper region of the insulating layer has thickness of 1500Å to 2000Å. The epitaxial growth layer which is exposed from the top side of an insulating film is defined as the active region. The insulating layer is defined as the element isolation film.
申请公布号 KR20110040096(A) 申请公布日期 2011.04.20
申请号 KR20090097237 申请日期 2009.10.13
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM, WAN SOO
分类号 H01L21/762 主分类号 H01L21/762
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