THIN FILM, METHOD FOR FORMING SAME, AND SEMICONDUCTOR LIGHT-EMITTING ELEMENT COMPRISING THE THIN FILM

摘要

Disclosed is a method for stably forming an N-doped ZnO compound thin film. Specifically, an N-doped ZnO compound thin film is formed on a substrate, which is an object on which a film is to be formed, by supplying a gas containing oxygen and nitrogen and a nitrogen gas together with an organic metal material gas into a low electron temperature high density plasma that is excited by a microwave.