| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump adapted to reduce the number of parts and improve efficiency in attaching work. SOLUTION: At least one stage of a plurality of stages of a fixed wing 33 is constituted of a plurality of separate fixed wings 33a, 33b arranged to contact in a circumferential direction, and the separate fixed wings 33a, 33b include a plurality of wind blades 330 which are arranged side by side in the circumferential direction and a circular spacer part 332 for positioning the plurality of wing blades 330 at predetermined positions to which outer circumferential parts of the plurality of wing blades 330 are connected. As a result, the number of parts can be reduced and attaching work efficiency can be improved without requiring a conventional spacer ring. As the plurality of separate fixed wings are connected with each other by O-rings 40, a reverse flow of gas at a connection part can be reduced. COPYRIGHT: (C)2011,JPO&INPIT |
