| 摘要 |
A reticle transport apparatus transports a reticle to and from a processing atmosphere. A reticle loader loads the reticle into the processing atmosphere, with at least a portion of the reticle being covered by a cover. A cover manipulator, in the processing atmosphere, removes the reticle from the cover and transfers the cover, without the removed reticle, to the reticle loader, and the reticle loader unloads the cover from the processing atmosphere. A cover cleaner, outside of the processing atmosphere, cleans the cover. When processing involving the reticle is completed, the reticle is returned to the cleaned cover or is placed in a different cover.
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