| 摘要 |
PROBLEM TO BE SOLVED: To provide a ring lighting system capable of preventing incorrect detection due to formation noise, and to provide a surface inspection apparatus that uses the system. SOLUTION: The ring lighting system is for having an object irradiated which has a light-shielding plate, having an optical aperture part concentric with a ring-like light-emitting section and having a diameter smaller than that of the light-emitting section, at a mid point between the light-emitting section and the object so as to prevent the object from being irradiated with a direct light from the light-emitting section. COPYRIGHT: (C)2011,JPO&INPIT |
