发明名称 |
Method for conditioning semiconductor wafers and/or hybrids |
摘要 |
The present invention provides a method for conditioning semiconductor wafers and/or hybrids having the steps: preparation of a space (1) which is at least partially enclosed and has a wafer/hybrid holding device (10) which is located therein and has the purpose of holding a semiconductor wafer and/or hybrid; and conduction of a dry fluid through the wafer/hybrid holding device (10) in order to heat-treat the wafer/hybrid holding device (10); wherein at least a portion of the fluid leaving the wafer/hybrid holding device (10) is used to condition the atmosphere within the space (1). The invention also provides a corresponding device for conditioning semiconductor wafers and/or hybrids.
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申请公布号 |
US7900373(B2) |
申请公布日期 |
2011.03.08 |
申请号 |
US20050511335 |
申请日期 |
2005.05.05 |
申请人 |
ERS ELECTRONIC GMBH |
发明人 |
REITINGER ERICH |
分类号 |
F26B11/06;G01R31/26;G01R31/30;H01L21/00;H01L21/02;H01L21/66 |
主分类号 |
F26B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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