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发明名称
METHOD FOR CLEANING WITH FLUORINE COMPOUND
摘要
申请公布号
KR20110020768(A)
申请公布日期
2011.03.03
申请号
KR20107025316
申请日期
2009.05.21
申请人
ASAHI GLASS COMPANY LTD.
发明人
OKAMOTO HIDEKAZU;NAMATSU HIDEO
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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