发明名称 METHOD OF INITIATING MOLECULAR BONDING
摘要 The invention relates to a method of initiating molecular bonding, comprising bringing one face (31) of a first wafer (30) to face one face (21) of a second wafer (20) and initiating a point of contact between the two facing faces. The point of contact is initiated by application to one of the two wafers, for example using a bearing element (51) of a tool (50), of a mechanical pressure in the range 0.1 MPa to 33.3 MPa.
申请公布号 US2011045611(A1) 申请公布日期 2011.02.24
申请号 US20090936639 申请日期 2009.08.06
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 CASTEX ARNAUD;BROEKAART MARCEL
分类号 H01L21/66;B32B37/10 主分类号 H01L21/66
代理机构 代理人
主权项
地址