SUBSTRATE CARRYING POSITION CONTROL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate carrying position control device capable of quickly and reliably displacing the carrying position of a flexible substrate in a desired direction while eliminating the need for installing a new installation for controlling the carrying position of the flexible substrate and keeping the construction of an existing carrying line as it is.

SOLUTION: The substrate carrying position control device includes a curvature radius variable roll 1 for imparting tension to the flexible substrate 10 to carry the flexible substrate 10 along the longitudinal direction. The curvature radius variable roll 1 partly varies its curvature radius in the axial direction for giving distribution to tension produced with the flexible substrate 10 contacting it, in the cross direction of the flexible substrate 10 to change the carrying position of the flexible substrate 10.

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