| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for pulling a single crystal, in which cleaning of a wire used for pulling the single crystal is efficiently carried out with a high degree of cleanliness without polluting the inside of a chamber. SOLUTION: The apparatus for pulling a single crystal at least pulls a grown single crystal to the inside of an upper chamber, consecutively connected to an upper part of a main chamber, from a melt in a crucible accommodated in the main chamber by a wire 11, and includes a wire cleaning mechanism 1. The wire cleaning mechanism 1 is arranged in the upper chamber and composed of at least: a gas blowing nozzle 12 for blowing out stuck substances on the wire 11 by blowing an inert gas to the wire 11 from a side direction; and a gas suction pipe 10 which has a through hole 14, through which the wire 11 is inserted movably in the vertical direction and rotatably, and sucks the inert gas, blown to the wire 11 from the gas blowing nozzle 12, from the opposite side of the gas blowing nozzle 12 and discharges the inert gas. COPYRIGHT: (C)2011,JPO&INPIT
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