METHOD OF FABRICATING THIN FILM SOLAR CELL

摘要

PURPOSE: A method for manufacturing a thin film solar cell is provided to improve the optical efficiency of the solar cell by forming concavo-convexes on the surface of a transparent electrode layer in order to increase the area of an optical absorbent layer. CONSTITUTION: A glass substrate(210) is prepared. A metal oxide transparent electrode layer(211) including high concentration dopants is formed on the glass substrate. An intrinsic silicon layer(213) and an n-type silicon layer(214) are formed on the glass substrate. A rear electrode layer(215) is formed on the glass substrate with the n-type silicon layer. Laser light with the periodic intensity is radiated to form a p-type silicon pattern(212) with an interference pattern shape on the boundary of the transparent electrode layer and the intrinsic silicon layer.