| 摘要 |
PURPOSE: An apparatus for manufacturing a uniform fluorine-containing tin oxide thin film is provided to easily form an FTO thin film with improved electrical characteristics and properties under the atmospheric pressure. CONSTITUTION: An apparatus(300) for manufacturing a uniform fluorine-containing tin oxide thin film uses one method selected from spray coating, ultrasonic wave spray coating, or ultrasonic wave spray methods. The apparatus for manufacturing a uniform fluorine-containing tin oxide thin film includes a deposition chamber(320) so that an FTO precursor droplet flows into a substrate(325) in parallel and is deposited. The deposition chamber includes a spraying portion(322) and a discharging portion(324). |
