| 摘要 |
PURPOSE:To obtain the titled metal oxide powder with high purity and useful as an auxiliary agent for sintering, with which a sintered body of AlN extremely minor of lattice defect and having an excellent heat conductivity is obtained, by heat-treating the powders of alkaline earth metal oxide in a gas stream contg. halogen in the existence of carbon. CONSTITUTION:The powders of alkaline earth metal with 0.1-10mu particle size (A) is heat-treated at 1,000-1,300 deg.C for 0.5-5hr in the gas stream with a flow rate of 10-100cc/min (to 1kg A component) consisting of a gaseous halogen such as Cl2, HCl, HF, perfluoroethane (C) contg. 5-50vol% of a carbon source in gaseous form such as halogenated hydrocarbon or hydrocarbonic compd., etc., (B) and/or in the above-mentioned stream consisting of C component added with 0.01-1wt% carbon source such as graphite or carbon powder (B') of A component amt.
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