摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of monitoring the sensitivity of output signals of a vibrator without continuing output of an output signal in a state that the sensitivity of output signals of the vibrator is degraded. <P>SOLUTION: The angular velocity sensor is configured to monitor the sensitivity of output signals of a vibrator 30 by inputting an output signal of a drive circuit to one of a first sense electrode 34 and a second sense electrode 35 and detecting an output signal from the other sense electrode. <P>COPYRIGHT: (C)2011,JPO&INPIT |