| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon refining apparatus effectively reduced in a temperature difference generated in the horizontal direction of a crucible by a heat-insulation covers used in a conventional silicon refining apparatus and to provide a silicon purification method using the refining apparatus.SOLUTION: A first embodiment of a silicon refining apparatus is a silicon refining apparatus having in a vacuum container a crucible capable of holding molten silicon, heat-insulation covers capable of being laid on the upper part of the crucible, and a heating apparatus which heats the molten silicon, wherein a first heat-insulation material surrounds the outer circumference of the side of the crucible, the heat-insulation covers are plate-form members made of carbon felt and are provided with carbon composite material on at least both principal planes, an opening which penetrates between the principal planes is formed in the heat insulation cover, and while the heat-insulation covers are laid on the upper surface of the crucible, the carbon composite material on the principal plane on the crucible side of each heat insulation cover is laid so as to cover the upper surface of the first heat-insulation material. |
