发明名称 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 A semiconductor memory device provided with a cell array section and a peripheral circuit section, the device includes: a back gate electrode; a stacked body provided on the back gate electrode; a plurality of semiconductor pillars extending in a stacking direction; connection members, each of the connection members connecting one of the semiconductor pillars to another one of the semiconductor pillars; a back-gate electrode contact applying a potential to the back gate electrode; a gate electrode provided in the peripheral circuit section; and a gate electrode contact applying a potential to the gate electrode, the back gate electrode and the gate electrode respectively including: a lower semiconductor layer; a conductive layer provided on the lower semiconductor layer; and an upper semiconductor layer provided on the conductive layer, the connection members being provided in or on the upper semiconductor layer, the back-gate electrode contact and the gate electrode contact being in contact with the conductive layer.
申请公布号 US2010327339(A1) 申请公布日期 2010.12.30
申请号 US20100728727 申请日期 2010.03.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TANAKA HIROYASU;KATSUMATA RYOTA;AOCHI HIDEAKI;KITO MASARU;FUKUZUMI YOSHIAKI;KIDOH MASARU;KOMORI YOSUKE;ISHIDUKI MEGUMI;MATSUNAMI JUNYA;FUJIWARA TOMOKO;KIRISAWA RYOUHEI;MIKAJIRI YOSHIMASA;OOTA SHIGETO
分类号 H01L27/115;H01L21/8246 主分类号 H01L27/115
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