| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a novel compound which is favorably used as a monomer for a polymer for a resist, and can improve solubility of the polymer for the resist to an organic solvent. <P>SOLUTION: There is provided a compound represented by general formula (A) wherein R<SB>1</SB>represents a hydrogen atom or a methyl group, R<SB>2</SB>represents a hydrogen atom or a 1-6C straight chain or branched hydrocarbon, X represents a bivalent group represented by -[CH<SB>2</SB>]<SB>n</SB>-COO- or a bivalent group represented by -[CH<SB>2</SB>]<SB>n</SB>-O-, n represents an integer of 1-4, and Z represents a methylene group or an oxygen atom. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
