Beam space-charge compensation device and ion implanation system having the same,申请号EP20050253605-传众专利搜索

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发明名称	Beam space-charge compensation device and ion implanation system having the same
摘要
申请公布号	EP1662541(A3)	申请公布日期	2010.12.15
申请号	EP20050253605	申请日期	2005.06.10
申请人	SEN CORPORATION, AN SHI AND AXCELIS COMPANY	发明人	KAWAGUCHI, HIROSHI;YAGITA, TAKANORI;NISHI, TAKASHI;MURAKAMI, JUNICHI;TSUKIHARA, MITSUKUNI;KABASAWA, MITSUAKI
分类号	H01J37/317;H01J37/02	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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