Producing trichlorosilane, useful for producing e.g. monosilane, comprises hydrodehalogenating silicon tetrachloride comprising contacting a gaseous, hydrogen and silicon tetrachloride containing reactant mixture with a magnetizable metal

摘要

Producing trichlorosilane comprises hydrodehalogenating silicon tetrachloride comprising contacting directly a gaseous, hydrogen and silicon tetrachloride containing reactant mixture with at least one magnetizable metal containing element. The element for hydrodehalogenation of silicon tetrachloride is inductively heated. Independent claims are also included for: (1) using a magnetized filter element together with an induction heater for carrying out the above mentioned method; and (2) using a reactor comprising non-magnetic material with an induction heater and an inductively heatable element contained in the magnetizable metal present in the reactor for carrying out the above mentioned method.