| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten the time required for inspecting a defect during groove processing by laser scribing, relating to manufacturing of a solar cell panel. <P>SOLUTION: The solar cell panel is manufactured by laser scribing using pulsed laser beam, to remove linearly a laminate film formed on a transparent substrate. There are provided an optical system for process-laser beam emission for performing laser scribing and an optical inspection system for inspecting the laminate film. A defect that occurs at the time of removing process is inspected with the optical inspection system, almost at the same time when removing the laminate film by laser scribing. <P>COPYRIGHT: (C)2010,JPO&INPIT |
