| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum gauge for low-temperature apparatus which is capable of performing measurement even when its measuring range is a region other than a molecular flow region, has improved the vibration-proof property and durability of the conventional vacuum gauge, is suitable for measuring, monitoring, etc., the degree of vacuum of a low-temperature apparatus to which impulses and vibration are applied, is hard to fail even if the pressure of a measuring object increases, and has a wide measuring range. Ž<P>SOLUTION: This vacuum gauge for low-temperature apparatus includes: a low temperature heat source 1 arranged inside a vacuum heat-insulating section, a plurality of heat receiving plates 2, 3, and 4 arranged so as to face this low-temperature source 1 with separations s, m, and L between them; a temperature sensor 5 for measuring the temperature of the low-temperature source 1, a plurality of thermometer sensors 6, 7, and 8 for measuring the respective temperatures of the plurality of heat receiving plates 2, 3, and 4; and a temperature sensor 10 for measuring the temperature of a thermal shield plate or partitions 9. A pressure range inside the vacuum heat-insulating section is detected from the temperature of the low-temperature source 1, the temperature of the shield plate or partitions 9, and respective temperature distributions of the heat receiving plates 2, 3, and 4. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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