| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of shortening the time needed to alternate batch conveyance of a plurality of substrates and sheet conveyance of one substrate. SOLUTION: The substrate processing apparatus includes a batch type first carrying-in/out mechanism 4 which carries a plurality of substrates W in a lump in and out of a hoop, held by a hoop holding unit, by a batch band 24, and a sheet type second carrying-in/out mechanism 5 which carries one substrate in and out of the batch band 24 and the hoop by first and second sheet bands 45 and 46 respectively. COPYRIGHT: (C)2010,JPO&INPIT |
