| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a nitride semiconductor laser element, which can improve a yield, and can manufacture efficiently the laser element of stable quality. SOLUTION: The method of manufacturing the nitride semiconductor laser element is the method of manufacturing the semiconductor laser element having a semiconductor laminate on a substrate, and includes: a step of forming the semiconductor laminate on the substrate; a step of forming an auxiliary groove having the first area, the second area with a depth deeper than that of the first area and the third area with a depth shallower than that of the first area, from an end face side of a resonator, in this order, along a resonator direction of a laser element forming area on a surface of the semiconductor laminate; and a step of dividing the substrate and the semiconductor laminate, using the auxiliary groove. COPYRIGHT: (C)2010,JPO&INPIT
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