| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly reliable piezoelectric vibration device in which damage upon an external terminal is reduced without reducing productivity. Ž<P>SOLUTION: A package member 3 air-tightly sealing an exciting electrode formed on a piezoelectric diaphragm includes a via 34 having a conductor filled inside a through-hole, which is passed through the package member in a thickness direction. The via 34 conducts and connects an electrode pattern 33 formed on one principal surface 31 and an external terminal 35 formed on another principal surface 32. Both terminals of the via 34 are formed while being recessed rather than both the principal surfaces (31, 32) of the package member. The external terminal 34 has a recessed part 36 inside the external terminal and is conducted and connected to a terminal portion of the via 34 at a side of the other principal surface 32. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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