INTENSITY AND COLOR DISPLAY FOR A THREE-DIMENSIONAL METROLOGY SYSTEM

摘要

Described are a method and apparatus for generating a display of a three-dimensional ("3D") metrology surface. The method includes determining a 3D point cloud representation of a surface of an object in a point cloud coordinate space. An image of the object is acquired in a camera coordinate space and then transformed from the camera coordinate space to the point cloud coordinate space. The transformed image is mapped onto the 3D point cloud representation to generate a realistic display of the surface of the object. In one embodiment, a metrology camera used to acquire images for determination of the 3D point cloud is also used to acquire the image of the object so that the transformation between coordinate spaces is not performed. The display includes a grayscale or color shading for the pixels or surface elements in the representation.